Daihen 3D80-001480-V1射频发生器

Daihen 3D80-001480-V1射频发生器 

1.产 品 资 料 介 绍：

Daihen 3D80-001480-V1射频发生器 产品英文介绍

The Daihen 3D80-001480-V1 RF generator is the core power source for generating plasma in semiconductor equipment.

Product Features:

1. Stable power output, stable plasma state, and good process consistency

2. Multiple protections, abnormal standing wave and over temperature overload will quickly cut off the output

3. Support pulse output and adapt to various etching and coating processes

4. Good heat dissipation performance, suitable for 7 × 24-hour continuous production on the production line

5. Standard original interface, easy to ｒｅｐｌａｃｅ and debug on the machine

Product Parameters:

1. Compatible with original communication protocols and can work in conjunction with external matching devices

2. Built in standing wave detection, real-time monitoring of load reflection

3. Adapt to the normal working temperature environment inside the cabinet

4. Support remote issuance of power control commands for the entire machine

5. Fault output alarm signal for quick troubleshooting

Application fields:

1. Plasma excitation power supply for semiconductor etching chamber

2. RF power supply for PECVD thin film deposition equipment

3. Power supply for wafer plasma cleaning process

4. Replacement of aging spare parts for second-hand machine RF power supply

5. Plasma process debugging after equipment maintenance

Daihen 3D80-001480-V1 directly affects the plasma state of the chamber and plays a key role in wafer processing yield

Daihen 3D80-001480-V1射频发生器 产品展示

视频展示

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218