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Komatsu HRX-604AH网络加热器控制器

发布时间:2026-09-14人气:
  • Komatsu HRX-604AH网络加热器控制器
  • Komatsu HRX-604AH网络加热器控制器
  • Komatsu HRX-604AH网络加热器控制器

Komatsu HRX-604AH网络加热器控制器  

1.产 品 资 料 介 绍:

做小松半导体设备维护的同行大多熟悉 Komatsu HRX-604AH 网络加热器控制器,这款是 Komatsu 半导体热处理设备温控主控单元,负责多路加热回路闭环控温,通过网络和机台主控通讯,管控工艺加热模组。
产品特点
1. 多通道独立控温,各组加热器温度单独调节,工艺温度一致性好
2. 网络通讯稳定,可和上位机实时交互温度设定值、采集测温数据
3. 内置多种保护,超温、断线、加热器短路都会触发报警停机
4. 抗粉尘抗静电设计,适配半导体洁净车间工况
5. 原装接口匹配,现场拆装替换简单,减少产线停机时间
产品参数
1. 适配 Komatsu 热处理 / 烘烤工艺设备
2. 支持多路 PT100 温度信号采集
3. 通讯方式:工业网络 + 模拟信号
4. 供电 AC100~240V 宽电压输入
5. 工作环境 5℃~40℃,无尘车间适用
应用领域
1.Komatsu 半导体烘烤设备加热器集中管控
2. 晶圆热处理工艺温度闭环控制
3. 光刻后烘烤单元加热回路调节
4. 薄膜工艺配套加热模组监控
5.Komatsu 热处理设备控制器备件维修更换
总的来说 Komatsu HRX-604AH 网络加热器控制器多路温控能力强,支持网络远程监控,热处理单元温控故障替换经常选用

Komatsu HRX-604AH网络加热器控制器  产品英文介绍

Most colleagues who maintain Komatsu semiconductor equipment are familiar with the Komatsu HRX-604AH network heater controller, which is the temperature control main control unit of Komatsu semiconductor heat treatment equipment. It is responsible for closed-loop temperature control of multiple heating circuits and controls the process heating module through network and machine control communication.

Product Features

1. Multi channel independent temperature control, with individual temperature adjustments for each group of heaters, ensuring good consistency in process temperature

2. Stable network communication, capable of real-time interaction with the upper computer for temperature setting values and temperature measurement data collection

3. Built in multiple protections, overheating, wire breakage, and heater short circuit will trigger alarms and shut down

4. Anti dust and anti-static design, suitable for semiconductor clean room working conditions

5. Original interface matching, easy on-site disassembly and replacement, reducing production line downtime

Product Specifications

1. Compatible with Komatsu heat treatment/baking process equipment

2. Support multi-channel PT100 temperature signal acquisition

3. Communication method: industrial network+analog signal

4. Power supply AC100~240V wide voltage input

5. Working environment 5 ℃~40 ℃, suitable for dust-free workshops

Application Areas

1. Centralized control of Komatsu semiconductor baking equipment heaters

2. Temperature closed-loop control of wafer heat treatment process

3. Heating circuit adjustment of post lithography baking unit

4. Monitoring of heating module for thin film process matching

5. Maintenance and replacement of spare parts for Komatsu heat treatment equipment controllers

Overall, Komatsu HRX-604AH network heater controller has strong multi-channel temperature control capability, supports remote network monitoring, and is often used for replacing temperature control faults in heat treatment units

Komatsu HRX-604AH网络加热器控制器   产品展示

HRX-604AH.webp.jpg

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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