LAM 27-382473-00射频匹配器

LAM 27-382473-00射频匹配器 

1.产 品 资 料 介 绍：

LAM 27-382473-00射频匹配器  产品英文介绍

LAM 27-382473-00 RF Matcher

Product Features:

1. Fast dynamic impedance adjustment, real-time compensation for plasma load fluctuations in the etching chamber, and low RF reflection power

2. Built in power protection mechanism, automatically cuts off the output when the load is abnormal, preventing damage to the RF power supply

3. All metal shielded cavity, resistant to strong electromagnetic interference, stable operation under long-term continuous production conditions

4. Equipped with status feedback communication, it can transmit real-time matching position, power, and fault information to the upper computer

5. Integrated structure, easy on-site disassembly and replacement, no need to modify the original RF circuit

Product Parameters:

1. Material model: 27-382473-00

2. Operating frequency: 13.56MHz

3. Rated RF power: 2500W

4. Control power supply: 24V DC

5. Compatible equipment: LAM semiconductor etching machine

Application fields:

1. Automatic matching of RF impedance in semiconductor dry etching chamber

2. Efficient transmission and control of RF energy in plasma technology

3. RF reflection power suppression in wafer etching process

4. Load matching and process stability guarantee for RF power supply matching

5. Replacement and maintenance of spare parts for LAM etching equipment RF system

This LAM 27-382473-00 RF matching device is the core component of the RF circuit in etching equipment, which continuously and stably completes impedance matching to ensure plasma process consistency. By checking the model, it can be quickly replaced on the machine.

LAM 27-382473-00射频匹配器  产品展示

视频展示

其他产品

GE DS200TCPDG1BEC 数字量输出模块
GE DS200TCPDG2BEC 涡轮风电控制器
GE DS200TCRAG1ACC 继电器输出板

英文产品

VMIVME-5588 Gas turbine expansion card
VMIVME-5588DMA Gas turbine interface card
VMIVME-5599 Gas turbine interface card

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218