1.产 品 资 料 介 绍：
AE 3150013-000射频发生器 产品英文介绍
AE 3150013-000 RF Generator
Product Features
1. High output power control accuracy, better repeatability of plasma process
2. Equipped with arc suppression function to reduce ignition and protect cavity components
Strong impedance adaptation capability with matching device for fast and stable illumination
4. Digital signal regulation facilitates remote monitoring of production lines
5. The whole machine has high durability and is suitable for long-term continuous operation of semiconductor equipment
Product Specifications
1. Adopt industrial AC input power supply to adapt to cabinet standard power supply
2 fixed RF output frequencies to meet plasma process requirements
3. Equipped with comprehensive fault self check and alarm signal output
4 Supports various industrial communication methods such as Ethernet serial ports
5. Water cooling and heat dissipation design for stable temperature control under high-power operating conditions
Application Areas
1. Power supply unit for semiconductor wafer plasma etching process
2 PECVD thin film deposition equipment RF power supply components
3 Vacuum chamber plasma cleaning matching generator
4. Plasma excitation power supply module for optical coating equipment
5 Material surface modification treatment plasma source power supply equipment
This AE 3150013-000 RF generator is widely used in semiconductor vacuum processes and is a commonly used replacement part for many imported equipment
AE 3150013-000射频发生器 产品展示
视频展示
其他产品
PM645B 可编程逻辑控制器模块
AMAT 1007-0016 印刷电路板
PFCL201C 20KN 压力传感器模块
3HNE06225-1/07 AEXB-02 Serial Link Controller
AM811F 3BDH000050R1 Serial Link Module
CI532V02 3BSE003827R1 Input Personality Module
| 5230 | 531X121PCRAGG3 | IMEC11 |
| 5220 | 03-169460-00 | IMRI002 |
| 5215 | 193X801BAG01 | INICTO3A |
| 5210 | 8055-SCP-452 | IMDSO02 |
| 50-0176-C | 3090-VPM-277-C1 | 720-21421-001 |
| 4VM82-008-4 | 3090-TB6 | UFC921A101 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
