TEL Tokyo Electron 3M80-001605-13输入/输出模块
1.产 品 资 料 介 绍：
中文资料：
产品型号： TEL Tokyo Electron 3M80-001605-13
产品类型： 输入/输出模块（I/O Module）
功能定位： 用于半导体制造设备中，实现设备与传感器及执行器之间的信号传输和控制
一、产品功能概述：
3M80-001605-13 输入/输出模块是 Tokyo Electron（TEL）设计的关键接口单元，负责采集设备现场的数字量及模拟量输入信号，并将控制信号输出至相应的执行器，如阀门、泵浦、马达等，从而实现工艺设备的自动化控制和状态监测。
二、主要应用领域：
半导体设备工艺控制接口
连接设备主控制系统与现场传感器及执行器，实现工艺参数的采集与控制指令的传递。
多通道信号采集与控制
支持多路数字输入/输出和模拟输入/输出，适应复杂工艺参数的实时监测和调整。
工艺自动化流程管理
协助主控系统实现自动化工艺流程控制，保证设备运行的稳定性和工艺一致性。
设备状态监测与故障报警
通过输入信号监测设备运行状态，及时反馈异常信号，支持故障诊断与维护。
模块化控制系统支持
作为模块化设备架构的关键组成，支持与其他控制模块的无缝集成。
英文资料：
Product model: TEL Tokyo Electron 3M80-001605-13
Product Type: I/O Module
Functional positioning: Used in semiconductor manufacturing equipment to achieve signal transmission and control between equipment, sensors, and actuators
1、 Product Function Overview:
The 3M80-001605-13 input/output module is a key interface unit designed by Tokyo Electron (TEL), responsible for collecting digital and analog input signals from the equipment site, and outputting control signals to corresponding actuators such as valves, pumps, motors, etc., thereby achieving automatic control and status monitoring of process equipment.
2、 Main application areas:
Semiconductor equipment process control interface
Connect the main control system of the device with on-site sensors and actuators to achieve the collection of process parameters and the transmission of control instructions.
Multi channel signal acquisition and control
Supports multiple digital inputs/outputs and analog inputs/outputs, adapting to real-time monitoring and adjustment of complex process parameters.
Process automation process management
Assist the main control system in achieving automated process control, ensuring the stability of equipment operation and process consistency.
Equipment status monitoring and fault alarm
By monitoring the operating status of the equipment through input signals, timely feedback of abnormal signals is provided to support fault diagnosis and maintenance.
Modular control system support
As a key component of modular device architecture, it supports seamless integration with other control modules.
2.产 品 展 示
3.其他产品
4.其他英文产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
