TEL Tokyo Electron 3M81-004199-11数字输入模块

TEL Tokyo Electron  3M81-004199-11数字输入模块

1.产 品 资 料 介 绍：

TEL Tokyo Electron 3M81-004199-11 数字输入模块 是一款用于半导体设备中的DI（Digital Input）采集模块，主要功能是将现场设备的开关量信号（如传感器、按钮、限位开关等）采集并传送给主控制系统。该模块在设备自动控制中承担关键“状态检测”角色，是设备逻辑控制的重要基础。

一、产品基本信息

• 型号： 3M81-004199-11

• 名称： 数字输入模块（Digital Input Module）

• 制造商： Tokyo Electron Ltd.（TEL）

• 用途： 采集外部开关状态信号并传输至设备主控系统

二、核心功能

1. 数字信号采集

   • 读取来自现场设备的二进制信号（如 ON/OFF、High/Low）。

2. 与主控制单元通信

   • 将采集的状态信号实时上传至 CPU 模块或PLC系统。

3. 电气隔离保护

   • 每一路输入端口通常具备光耦隔离功能，提高系统抗干扰性能和电气安全性。

4. 用于逻辑判断与控制决策

   • 通过逻辑编程，实现如安全联锁、状态判断、流程控制等功能。

三、应用领域

该模块广泛应用于 TEL 的多种半导体设备 中，典型使用场景包括：

1. 设备机械结构监测

• 检测门盖开关、舱体锁定、定位器到位、搬运机械动作完成等状态。

2. 气体和液体系统状态反馈

• 读取阀门开关状态、气体流路切换信号、压力开关触发状态等。

3. 安全与故障联锁

• 采集安全门、急停开关、异常报警触点等输入信号，形成保护机制。

4. 控制流程驱动依据

• 作为设备启动/停止、步骤转换、自动运行逻辑的触发输入来源。

英文资料：

The TEL Tokyo Electron 3M81-004199-11 digital input module is a DI (Digital Input) acquisition module used in semiconductor equipment. Its main function is to collect and transmit switch signals (such as sensors, buttons, limit switches, etc.) from field devices to the main control system. This module plays a crucial role in "state detection" in equipment automatic control and is an important foundation for equipment logic control.

1、 Basic Product Information

Model: 3M81-004199-11

Name: Digital Input Module

Manufacturer: Tokyo Electron Ltd. (TEL)

Purpose: Collect external switch status signals and transmit them to the equipment control system

2、 Core functions

Digital signal acquisition

Read binary signals from on-site devices (such as ON/OFF, High/Low).

Communicate with the main control unit

Upload the collected status signals in real-time to the CPU module or PLC system.

Electrical isolation protection

Each input port usually has optocoupler isolation function to improve the system's anti-interference performance and electrical safety.

Used for logical judgment and control decision-making

Implement functions such as safety interlocking, status judgment, and process control through logical programming.

3、 Application Fields

This module is widely used in various semiconductor devices of TEL, and typical usage scenarios include:

1. Monitoring of equipment mechanical structure

Check the status of door cover switch, cabin locking, locator in place, and completion of handling mechanical actions.

2. Gas and liquid system status feedback

Read valve switch status, gas flow path switching signal, pressure switch trigger status, etc.

3. Safety and fault interlocking

Collect input signals such as safety doors, emergency stop switches, and abnormal alarm contacts to form a protection mechanism.

4. Control process driven basis

As a trigger input source for device start/stop, step transition, and automatic operation logic.

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218