AMAT Applied Materials 0120-90622控制器

1.产 品 资 料 介 绍：

AMAT Applied Materials 0120-90622 控制器

一、核心规格与技术参数

二、典型应用场景

1. 半导体晶圆制造：用于刻蚀机、PECVD（等离子体增强化学气相沉积）设备、清洗机等核心制程工具，监控单台或多台设备的实时能耗，优化生产调度以降低整体能耗。
2. 平板显示（LCD/OLED）制程：适配显示面板制造中的蒸镀、曝光等设备，采集工艺过程中的能源消耗与环境参数，辅助提升制程稳定性与能源利用率。
3. 光伏电池生产：针对光伏硅片镀膜、刻蚀等设备，通过能耗数据分析识别高耗能环节，结合智能闲置模式减少非生产时段的能源浪费。

AMAT Applied Materials 0120-90622控制器 英文资料：

AMAT Applied Materials 0120-90622 Controller

AMAT 0120-90622 is an iSystem designed specifically for semiconductor wafer process equipment ®  The intelligent factory system controller focuses on energy consumption monitoring, environmental data acquisition, and operation optimization of 200 mm/300 mm wafer equipment, while also possessing equipment status synchronization and safety control capabilities. It is a key component for achieving factory level energy management and process collaboration.

1、 Core specifications and technical parameters

Detailed description of project specifications/indicators

Functional positioning: energy consumption monitoring+data collection+optimization control. Real time collection of equipment parameters such as power consumption, gas consumption, temperature and humidity, etc., generating energy consumption and greenhouse gas emission analysis reports to assist in process energy-saving optimization

Applicable equipment: 200 mm/300 mm wafer process equipment compatible with AMAT's own etching, film deposition, cleaning and other equipment, while supporting third-party process tools that comply with industry standards

Device access quantity: A single controller with ≤ 4 tools can achieve synchronous monitoring of multiple devices at the Fab (wafer fab) or sub Fab level, reducing the number of hardware deployments

The fail safe mechanism in safety design automatically triggers the device safety protection mode when the controller or communication link is abnormal, avoiding process interruption or data loss, and ensuring production safety and data integrity

Intelligent Idle mode recognition device with energy-saving function can automatically adjust device operating parameters (such as reducing local power consumption and adjusting gas flow) during non production periods (such as standby and maintenance intervals), in compliance with SEMI E167 (device sleep mode) and SEMI E175 (energy management standards)

Data exchange supports the E3 standard, and the FSS data server can be connected to the factory level E3 (Equipment Engineering Data Collection) system or FSS (Factory Service System) data server to achieve the summary, analysis, and traceability of equipment data throughout the factory

Power supply and size standard industrial DC power supply (24 VDC ± 10%); Compact design suitable for installation space in most semiconductor equipment control cabinets, without the need for additional layout space, making it easy to integrate into existing systems

2、 Typical application scenarios

Semiconductor wafer manufacturing: used for core process tools such as etching machines, PECVD (plasma enhanced chemical vapor deposition) equipment, cleaning machines, etc., to monitor real-time energy consumption of single or multiple devices, optimize production scheduling to reduce overall energy consumption.

Flat panel display (LCD/OLED) process: Adapt to equipment such as evaporation and exposure in display panel manufacturing, collect energy consumption and environmental parameters during the process, and assist in improving process stability and energy utilization efficiency.

Photovoltaic cell production: For equipment such as photovoltaic silicon wafer coating and etching, high energy consumption links are identified through energy consumption data analysis, combined with intelligent idle mode to reduce energy waste during non production periods.

AMAT Applied Materials 0120-90622控制器 产品展示      

 产品视频

3.其他产品

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218