AMAT Applied Materials 0010-09195机器人组件

AMAT Applied Materials  0010-09195机器人组件 

1.产 品 资 料 介 绍：

关键规格

结构与功能特点

• 高精度运动链：谐波减速器与精密轴承组合，实现 ±0.05mm 重复定位。
• 洁净设计：机身表面阳极氧化处理，关节密封防颗粒泄漏，适用于 ISO 1 级洁净室或真空环境。
• 模块化关节：各轴可独立更换，维护便捷，缩短停机时间。
• 安全互锁：内置限位开关与碰撞检测，确保晶圆与设备安全。
• 高速度：优化轨迹规划，实现 180°/s 关节速度，满足高产能需求。

AMAT Applied Materials 0010-09195机器人组件  英文资料：

AMAT Applied Materials 0010-09195 is a 6-axis vertical serial robot assembly designed specifically for semiconductor equipment wafer transfer. It is widely used in systems such as P5000 CVD and can stably transport 4 ", 5", and 6 "wafers.

Key specifications

Project Specification Description

Suitable for standard semiconductor wafers with wafer sizes of 4 ", 5", and 6 "

Axis number 6: waist, shoulder, elbow, wrist rotation and pitch

Load capacity ≤ 3kg including end effector

Repeated positioning accuracy ± 0.05mm ensures precise placement of wafers

Maximum motion speed J1: 180 °/s; J6: 360 °/s to meet high beat requirements

The working radius is about 850mm, covering typical process chambers

Vacuum or clean room working environment requires the use of vacuum sealing components

Power supply 24V DC, three-phase AC 200-240V driver and motor power supply

Connect EtherCAT and RS-485 communication interfaces to the device controller

Weight approximately 120kg without packaging

Structural and functional characteristics

High precision motion chain: Harmonic reducer combined with precision bearings to achieve ± 0.05mm repeated positioning.

Clean design: The surface of the body is anodized, and the joints are sealed to prevent particle leakage, suitable for ISO Class 1 clean rooms or vacuum environments.

Modular joints: Each axis can be independently replaced, making maintenance convenient and reducing downtime.

Safety interlock: Built in limit switch and collision detection to ensure the safety of wafers and equipment.

High speed: Optimize trajectory planning to achieve a joint speed of 180 °/s, meeting high production capacity requirements.

 AMAT Applied Materials 0010-09195机器人组件 产品展示      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218