AMAT Applied Materials 0190-27350升降机组件

AMAT Applied Materials 0190-27350升降机组件

1.产 品 资 料 介 绍：

核心规格

结构与原理

1. 气缸：双作用设计，提供稳定垂直驱动力。
2. 导向机构：采用直线导轨或导杆，确保升降过程无摆动。
3. 晶圆承载台：表面镀硬铬或特氟龙涂层，防止晶圆划伤。
4. 缓冲装置：内置可调缓冲器，减少冲击，保护晶圆。
5. 控制部分：通过电磁阀实现上升、下降、停止控制，并可配接近开关检测位置。

AMAT Applied Materials 0190-27350升降机组件英文资料：

AMAT 0190-27350 is a specialized pneumatic lift component for wafer transfer systems, used to achieve vertical lifting and precise positioning of wafers in vacuum or clean environments, and is compatible with semiconductor equipment such as Centura and Endura.

Core specifications

Project parameter description

Functional positioning: vertical lifting and positioning of wafers, combined with a robotic arm to complete wafer loading and unloading

Dual acting cylinder with smooth and clean driving mode, free from oil pollution

Load capacity ≤ 10 kg (single wafer) compatible with 8 "and 12" wafers

100 mm (customizable) standard wafer transfer height range

Working pressure 4~6 bar, typical 5 bar operation

Adjustable lifting speed of 50~150 mm/s with throttle valve adjustment

Repetitive positioning accuracy of ± 0.1 mm meets high-precision processes such as photolithography and etching

Interface type: Gas port: G1/4 "; Control: M8 × 1 4-pin compatible with AMAT standard trachea and control line

Material and protective cylinder body: anodized aluminum alloy; Guide rod: Stainless steel corrosion-resistant, suitable for high cleanliness environment

Environmental temperature: 5-40 ℃. Avoid high temperature and condensation

Installation method 4-M6 screw hole, fixed at the bottom to adapt to the standard installation position of the equipment

Structure and Principle

This component consists of a cylinder body, a guiding mechanism, a wafer carrier, and a buffer device:

Cylinder: Double acting design, providing stable vertical driving force.

Guiding mechanism: using linear guide rails or guide rods to ensure no swinging during the lifting process.

Wafer carrier: The surface is coated with hard chromium or Teflon to prevent wafer scratches.

Buffer device: Built in adjustable buffer to reduce impact and protect the wafer.

Control part: The rise, fall, and stop control are achieved through solenoid valves, and proximity switches can be equipped to detect the position.

 AMAT Applied Materials 0190-27350升降机组件产品展示      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218