AMAT Applied Materials 0100-35070射频发生器接口模块

AMAT Applied Materials  0100-35070射频发生器接口模块

1.产 品 资 料 介 绍：

AMAT Applied Materials  0100-35070射频发生器接口模块 英文资料：

1、 Core positioning and system of the product

The 0100-35070 RF generator interface module is a key signal interaction and control hub in the RF power system of semiconductor equipment from Applied Materials Company (AMAT), and belongs to the "RF System Intelligent Interconnection" product line. In core processes such as wafer etching and PECVD that rely on radio frequency energy to excite plasma, the radio frequency generator needs to achieve precise coordination with the equipment's main control system, matching device, and process chamber. This interface module serves as a "signal translator" and is specifically designed to adapt to the radio frequency circuits of AMAT Centura and Producer series equipment. Through standardized interfaces, it integrates multiple types of signals such as power control, status feedback, and safety interlock, and is the core technical unit that ensures stable output of radio frequency energy and achieves closed-loop control of process parameters.

2、 Analysis of core functions and technical characteristics

Based on the signal interaction requirements of semiconductor RF systems and industry technical standards, the core characteristics of this interface module can be accurately disassembled into the following points:

Multi type signal integrated transmission: equipped with 16 mixed signal channels (including 8 analog signals and 8 digital signals), capable of synchronously processing three types of core signals: first, control command signals (such as power setting value 0-10V analog quantity, RF ON/OFF digital switch signal); The second is the state feedback signal (such as forward power 4-20mA current feedback, reverse power voltage signal); The third is the safety interlock signal (such as the dry contact signal of vacuum interlock and door control interlock), with a signal transmission delay of ≤ 1ms and a sampling frequency of ≥ 2kHz, ensuring the real-time performance of instructions and feedback.

Standardized interface compatibility design: Equipped with dual 15 pin dual row D-type (DB-15) interfaces, strictly following the RF equipment signal transmission specifications -2-pin receives reverse power signals, 3-pin receives forward power signals, 4-pin and 9-pin output RF ON control signals, 5-pin outputs power setting signals, 11-12 pin access interlock protection signals, and integrated EtherNet/IP industrial Ethernet interface, it can seamlessly interface with AMAT main controllers and third-party RF generators (such as MKS, Advanced Energy brands), with interface impedance matching 50 Ω, effectively reducing signal transmission losses.

Intelligent signal conditioning and isolation: Built in high-precision signal conditioning circuit amplifies analog signals (gain adjustable 0-10 times), filters (cutoff frequency 10kHz low-pass filtering), optimizes power feedback signal accuracy to ± 0.1% FS; uses optoelectronic isolation technology to achieve electrical isolation between control circuit and power circuit (isolation voltage ≥ 2500V DC), can resist radio frequency interference (EMI) and common mode noise, and avoid power fluctuations caused by signal crosstalk.

 AMAT Applied Materials  0100-35070射频发生器接口模块 产品展示      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218