AMAT Applied Materials 0021-09550底盘
1.产 品 资 料 介 绍:
- 高刚性材质选型:采用冷轧钢板(厚度 3-5mm)或铝合金型材(6061-T6)作为主体材质,冷轧钢板屈服强度≥235MPa,铝合金型材抗拉强度≥310MPa,兼具轻量化与高承重能力,可承载设备内部电源模块、控制单元、传动机构等组件(最大承载重量≥50kg),长期使用无明显形变(形变量≤0.1mm/m),避免因结构变形导致模块错位、线路接触不良。
- 模块化分区布局:根据半导体设备模块功能需求,划分独立安装区域,如电源舱、控制舱、散热舱等,各区域通过可拆卸隔板分隔,隔板厚度≥2mm,且预留标准化安装孔位(孔径 4-6mm,孔距 25-50mm),适配 AMAT 设备内部 PCB 板、驱动器、传感器等组件的安装尺寸,无需额外打孔改造,降低设备集成难度,同时便于模块单独检修与更换。
- 抗震与稳定性优化:底盘底部配备防震脚垫(材质为丁腈橡胶,硬度 50±5 Shore A),可吸收设备运行时机械振动(振动衰减率≥80%),减少振动对精密模块(如晶圆传输机构、检测传感器)的影响;同时底盘四角设置加固角钢(厚度≥4mm),提升整体抗扭强度(抗扭刚度≥150N・m/°),避免设备搬运或安装过程中因外力冲击导致结构损坏。
- 防尘与洁净兼容:外壳采用全封闭结构,防护等级达 IP65,面板缝隙处配备发泡硅胶密封条(压缩量 30%-50%),可有效阻挡洁净车间的微尘颗粒(粒径≥0.1μm)侵入底盘内部,避免粉尘附着在电路板、连接器表面导致的短路或信号干扰;同时底盘表面采用电解抛光处理(表面粗糙度 Ra≤0.8μm),不易积尘且便于清洁,符合半导体行业 ISO Class 5 洁净室标准。
AMAT Applied Materials 0021-09550底盘 英文资料:
1、 High strength structural design: Building a solid foundation for semiconductor equipment support
As the "skeleton carrier" of semiconductor equipment, the 0021-09550 chassis is designed with a stable and durable structure as its core, providing reliable support and installation space for precision modules inside the equipment
High rigidity material selection: Cold rolled steel plate (thickness 3-5mm) or aluminum alloy profile (6061-T6) is used as the main material. The yield strength of cold-rolled steel plate is ≥ 235MPa, and the tensile strength of aluminum alloy profile is ≥ 310MPa. It has both lightweight and high load-bearing capacity, and can carry internal components such as power modules, control units, and transmission mechanisms of equipment (maximum load-bearing weight ≥ 50kg). Long term use has no significant deformation (deformation ≤ 0.1mm/m), avoiding module misalignment and poor line contact caused by structural deformation.
Modular partition layout: Based on the functional requirements of semiconductor equipment modules, independent installation areas are divided, such as power supply cabin, control cabin, heat dissipation cabin, etc. Each area is separated by removable partitions with a thickness of ≥ 2mm, and standardized installation holes are reserved (hole diameter 4-6mm, hole spacing 25-50mm) to adapt to the installation size of internal PCB boards, drivers, sensors and other components of AMAT equipment, without the need for additional drilling and modification, reducing the difficulty of equipment integration, and facilitating separate maintenance and replacement of modules.
Seismic and stability optimization: The bottom of the chassis is equipped with shock-absorbing foot pads (made of nitrile rubber with a hardness of 50 ± 5 Shore A), which can absorb mechanical vibrations during equipment operation (vibration attenuation rate ≥ 80%) and reduce the impact of vibrations on precision modules such as wafer transfer mechanisms and detection sensors; At the same time, reinforced angle steel (thickness ≥ 4mm) is installed at the four corners of the chassis to enhance the overall torsional strength (torsional stiffness ≥ 150N · m/°), avoiding structural damage caused by external impact during equipment handling or installation.
2、 Comprehensive protection performance: resistant to complex environments in semiconductor manufacturing
In response to the harsh environment inside semiconductor cleanrooms and equipment, the 0021-09550 chassis has upgraded its protective design to ensure the safe operation of internal modules
Dustproof and clean compatibility: The shell adopts a fully enclosed structure with a protection level of IP65. Foam silicone sealing strips (compression capacity of 30% -50%) are equipped at the panel gaps, which can effectively prevent fine dust particles (particle size ≥ 0.1 μ m) from entering the interior of the chassis in the clean workshop, avoiding short circuits or signal interference caused by dust adhering to the surface of circuit boards and connectors; At the same time, the chassis surface is treated with electrolytic polishing (surface roughness Ra ≤ 0.8 μ m), which is not easy to accumulate dust and is easy to clean, meeting the ISO Class 5 cleanroom standard of the semiconductor industry.
AMAT Applied Materials 0021-09550底盘 产品展示
产品视频
3.其他产品
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710-327127-006 | 193X804ADG01 | F31X134EPRBNG1 |
710-303063-00 | 6DD1684-0EA0 | F31X133PRUAPG1 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218