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AMAT Applied Materials 0100-00003步进驱动器模块

发布时间:2025-10-11人气:
  • AMAT Applied Materials 0100-00003步进驱动器模块
  • AMAT Applied Materials 0100-00003步进驱动器模块
  • AMAT Applied Materials 0100-00003步进驱动器模块

AMAT Applied Materials  0100-00003步进驱动器模块

1.产 品 资 料 介 绍:

一、产品概述
AMAT 0100-00003 步进驱动器模块是半导体晶圆传输设备(如 AMAT Endura 系列机械臂)的核心驱动组件,主要实现对步进电机的精准转速、位置控制,驱动机械臂完成晶圆抓取、传输等动作。模块支持细分控制与实时电流调节,能减少电机运行振动,适配半导体设备对运动精度的严苛需求,可直接替换原厂同型号老旧驱动器,无需调整设备控制逻辑。
二、关键参数
  • 适用系统:优先适配 AMAT Endura 系列晶圆传输设备,兼容 AMAT 同类步进电机驱动场景
  • 电机适配:支持两相混合式步进电机,额定电流 1.5A-3A,适配电机步距角 1.8°(细分后最小步距 0.09°)
  • 控制方式:脉冲 + 方向信号控制,支持 16 档细分(1-256 细分可调),脉冲频率≤200kHz
  • 保护功能:过流保护(3.5A 触发)、过温保护(85℃触发)、欠压保护(18V DC 触发)、短路保护
  • 电源需求:DC 24V-48V 宽压输入,功耗≤30W(满负载运行)
  • 物理尺寸:长 100mm× 宽 60mm× 高 30mm,安装孔位适配原厂设备支架,螺丝固定(M3 规格)
  • 环境适应:工作温度 - 5℃-65℃,相对湿度≤90% RH(无凝露),抗电磁干扰符合 EN 61000-6-3 标准

AMAT Applied Materials  0100-00003步进驱动器模块 英文资料:

1、 Product Overview

The AMAT 0100-00003 stepper driver module is the core driving component of semiconductor wafer transfer equipment, such as the AMAT Endura series robotic arm. It mainly realizes precise speed and position control of the stepper motor, and drives the robotic arm to complete wafer grasping, transfer and other actions. The module supports subdivision control and real-time current regulation, which can reduce motor vibration and meet the strict requirements of semiconductor equipment for motion accuracy. It can directly replace old drivers of the same model from the original factory without adjusting the equipment control logic.

2、 Key parameters

Applicable system: Priority adaptation to AMAT Endura series wafer transfer equipment, compatible with AMAT's similar stepper motor drive scenarios

Motor adaptation: Supports two-phase hybrid stepper motors with a rated current of 1.5A-3A and an adaptive motor step angle of 1.8 ° (minimum step angle after subdivision is 0.09 °)

Control mode: Pulse+direction signal control, supports 16 levels of subdivision (1-256 subdivision adjustable), pulse frequency ≤ 200kHz

Protection functions: overcurrent protection (triggered by 3.5A), over temperature protection (triggered by 85 ℃), under voltage protection (triggered by 18V DC), short circuit protection

Power requirement: DC 24V-48V wide voltage input, power consumption ≤ 30W (full load operation)

Physical dimensions: 100mm in length, 60mm in width, and 30mm in height. The installation holes are compatible with the original equipment bracket and fixed with screws (M3 specification)

Environmental adaptation: Working temperature -5 ℃ -65 ℃, relative humidity ≤ 90% RH (no condensation), anti electromagnetic interference in accordance with EN 61000-6-3 standard

AMAT Applied Materials  0100-00003步进驱动器模块 产品展示      

0100-00003_stepper_drive_pcb_vme_card_p5000_applied_materials_amat.jpg

 产品视频

3.其他产品

Watlow CLS204-1200000 温度控制器
TMEIC ARND-3110A控制模块
BENDER  IRDH575B1W-435地面故障探测器

4.其他英文产品

FBM219 RH916RH Thermal resistance module
FBM237 RH914XS Digital module
NI SCXI-1349 Output interface card

AMAT 0190-37178AMAT 0190-76101C400/10/1/1/1/00
AMAT 0190-54047AMAT 0190-76142LDGRB-01 3BSE013177R1
AMAT 0190-01486AMAT 0190-76150140CPU67160
AMAT 0190-66024AMAT 0190-761853500/72-01-00 140734-08
AMAT 0190-16010AMAT 0190-76252369-LO-0-M-0-0-0-E
AMAT 0190-54639AMAT 0190-76263PCD231B

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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