AMAT Applied Materials 0100-90271晶圆装载机联锁模块
1.产 品 资 料 介 绍：
- 适用系统：优先适配 AMAT FOUP 系列晶圆装载机，兼容 AMAT 同类晶圆传输设备安全回路
- 联锁功能：支持 2 路门体联锁检测（装载机前门 + 舱门），1 路安全回路输出（常闭触点）
- 信号类型：数字量输入（24V DC，检测门体传感器信号）、继电器输出（250V AC/30V DC，5A）
- 保护机制：过压保护（30V DC 触发）、短路保护（输出端短路时自动断开）
- 电源需求：DC 24V±10%，功耗≤5W（静态功耗≤1W）
- 物理尺寸：长 80mm× 宽 60mm× 高 25mm，安装孔位适配原厂设备支架，M2.5 螺丝固定
- 环境适应：工作温度 0℃-55℃，相对湿度≤85% RH（无凝露），抗电磁干扰符合 EN 61000-6-2 标准
- 安全冗余：双路门体检测独立触发，任一联锁异常立即切断安全回路，响应时间≤10ms
- 原厂兼容：尺寸、接口定义、触点参数与原厂完全匹配，替换后无需重新校准安全回路
- 高可靠性：继电器触点寿命≥10 万次，工业级检测芯片抗干扰，MTBF≥6 万小时
AMAT Applied Materials 0100-90271晶圆装载机联锁模块 英文资料：
1、 Product Overview
The AMAT 0100-90271 wafer loader interlock module is the safety control core component of semiconductor wafer loaders (such as AMAT Front Opening Unified Pod, FOUP loader), mainly realizing equipment door interlock, door status monitoring, and safety circuit triggering functions. When the loader door is not closed or the cabin door is abnormally opened, the module will immediately cut off the equipment power circuit to prevent wafer collision and personnel accidental contact risks. It adapts to the safety protection requirements of the semiconductor wafer transmission link and can directly ｒｅｐｌａｃｅ the original module of the same model without adjusting the equipment safety control logic.
2、 Key parameters
Applicable system: Priority adaptation to AMAT FOUP series wafer loader, compatible with AMAT's similar wafer transfer equipment safety circuit
Interlocking function: Supports 2-way door interlock detection (loader front door+cabin door), 1-way safety circuit output (normally closed contact)
Signal type: digital input (24V DC, detecting door sensor signal), relay output (250V AC/30V DC, 5A)
Protection mechanism: overvoltage protection (triggered by 30V DC), short circuit protection (automatically disconnected when output terminal short circuit occurs)
Power requirement: DC 24V ± 10%, power consumption ≤ 5W (static power consumption ≤ 1W)
Physical dimensions: 80mm in length, 60mm in width, and 25mm in height. The installation holes are compatible with the original equipment bracket and secured with M2.5 screws
Environmental adaptation: working temperature of 0 ℃ -55 ℃, relative humidity ≤ 85% RH (no condensation), anti electromagnetic interference in accordance with EN 61000-6-2 standard
3、 Core advantages
Security redundancy: The dual door detection is independently triggered, and any interlock abnormality will immediately cut off the safety circuit, with a response time of ≤ 10ms
Original factory compatibility: The size, interface definition, and contact parameters are completely matched with the original factory, and there is no need to recalibrate the safety circuit after replacement
High reliability: Relay contact life ≥ 100000 times, industrial grade detection chip anti-interference, MTBF ≥ 60000 hours
AMAT Applied Materials 0100-90271晶圆装载机联锁模块 产品展示
产品视频
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
