AMAT Applied Materials AX8200D控制器
1.产 品 资 料 介 绍：
- 适用系统：优先适配 AMAT Varian 系列离子注入机、AdvantEdge 系列蚀刻机，兼容 AMAT 同类高端半导体设备
- 控制能力：8 轴运动控制（支持伺服 / 步进电机，定位精度≤±0.001mm）、16 路模拟量输入（4-20mA/0-10V，采样精度 16 位）、12 路模拟量输出（4-20mA/0-10V，输出精度 12 位）、32 路数字量 I/O（24V DC）
- 工艺控制精度：温度控制 ±0.05℃（100-600℃区间）、压力控制 ±0.1% FS（真空 / 常压场景）、流量控制 ±0.3% FS（适配 AMAT MFC 模块）
- 通信接口：EtherCAT（实时运动控制，周期≤1ms）、Profinet（工艺数据交互）、以太网（TCP/IP，支持 MES 系统对接）、RS485（Modbus-RTU，连接外围传感器）
- 电源需求：DC 48V±10%，功耗≤50W（满负载运行），具备过压（60V）、欠压（38V）、过流（2A）、过温（85℃）四重保护
- 物理尺寸：长 220mm× 宽 140mm× 高 50mm，安装孔位适配原厂设备电气柜标准导轨，M4 螺丝固定
- 环境适应：工作温度 - 15℃-70℃，相对湿度≤90% RH（无凝露），抗电磁干扰符合 EN 61000-6-4 标准（射频场强 20V/m，80MHz-1GHz 无性能波动）
AMAT Applied Materials AX8200D控制器 英文资料：
1、 Product Overview
The AMAT AX8200D controller is the core of multi axis motion and process coordination control for high-end semiconductor wafer processing equipment, such as the AMAT Varian series ion implantation machine and AdvantEdge series etching machine. It mainly achieves high-precision positioning of the wafer stage, ion beam current regulation, and multi-channel coordinated control of process gases. Through multi task real-time scheduling algorithms, it ensures the synchronous operation of multiple processes of the equipment. The module supports seamless integration with device sensors, actuators, and factory MES systems, and can directly ｒｅｐｌａｃｅ old controllers of the same model from the original factory without the need to reconstruct device control logic, quickly restoring the high-precision operation capability of the equipment.
2、 Key parameters
Applicable system: Priority adaptation to AMAT Varian series ion implantation machine, AdvantEdge series etching machine, compatible with AMAT high-end semiconductor equipment of the same kind
Control capability: 8-axis motion control (supporting servo/stepper motors, positioning accuracy ≤ ± 0.001mm), 16 analog inputs (4-20mA/0-10V, sampling accuracy 16 bits), 12 analog outputs (4-20mA/0-10V, output accuracy 12 bits), 32 digital I/O (24V DC)
Process control accuracy: temperature control ± 0.05 ℃ (100-600 ℃ range), pressure control ± 0.1% FS (vacuum/atmospheric pressure scenario), flow control ± 0.3% FS (compatible with AMAT MFC module)
Communication interfaces: EtherCAT (real-time motion control, cycle ≤ 1ms), Profinet (process data exchange), Ethernet (TCP/IP, supporting MES system docking), RS485 (Modbus RTU, connecting peripheral sensors)
Power requirement: DC 48V ± 10%, power consumption ≤ 50W (full load operation), with four layers of protection: overvoltage (60V), undervoltage (38V), overcurrent (2A), and over temperature (85 ℃)
Physical dimensions: 220mm in length, 140mm in width, and 50mm in height. The installation holes are compatible with the standard guide rails of the original equipment electrical cabinet, and are fixed with M4 screws
Environmental adaptation: Working temperature -15 ℃ -70 ℃, relative humidity ≤ 90% RH (no condensation), anti electromagnetic interference in accordance with EN 61000-6-4 standard (RF field strength 20V/m, 80MHz-1GHz without performance fluctuations)
AMAT Applied Materials AX8200D控制器 产品展示
产品视频
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
