1.产 品 资 料 介 绍：
Yaskawa 0190-41805 晶圆预对准器产品特点
- 安川原厂配套，适配 AMAT 300mm 半导体沉积刻蚀机台
- CCD 线阵光学传感，非接触式检测晶圆边缘与缺口标记
- 超高定位精度，中心偏差≤0.1mm，旋转角度误差 ±0.03°
- 高速校准流程，单次晶圆对位耗时低于 1.7 秒，提升产线节拍
- 真空吸附承载方式，贴合硅片、石英晶圆，无边缘夹伤缺陷
- 伺服旋转驱动，运行平稳无抖动，适配超薄易碎晶圆
- 洁净室 ISO1 级标准机身，低释气材质，避免晶圆微粒污染
- 内置多重真空监测，漏气自动报警，防止晶圆掉落破损
- 一体式屏蔽结构，抵御腔体射频电磁干扰，传感稳定
- 模块化拆装设计，整机快速拆卸，缩短机台停机维护时长
- 支持缺口 / 平边两种晶圆基准识别，适配多种工艺晶圆
- 配套机台总线通讯，实时上传对位数据给主控系统
- 低粉尘密封轴承，长期 7×24 小时洁净车间连续运行
- 自带故障状态指示灯，快速定位真空、传感、电机异常
- 小型化紧凑机身，适配设备内部狭小传送腔安装空间Yaskawa 0190-41805 晶圆预对准器是 300mm 晶圆传送核心校准单元，精度高、洁净度优，保障搬运与工艺制程稳定性。
Advantech ASMB-925 主板 产品英文
Yaskawa 0190-41805 Wafer Pre Alignment Device Product Features
Yaskawa original factory matching, compatible with AMAT 300mm semiconductor deposition etching machine
CCD linear array optical sensing for non-contact detection of wafer edges and notch markings
Ultra high positioning accuracy, center deviation ≤ 0.1mm, rotation angle error ± 0.03 °
High speed calibration process, with a single wafer alignment time of less than 1.7 seconds, improving production line rhythm
Vacuum adsorption bearing method, attached to silicon wafers and quartz wafers, without edge pinch defects
Servo rotary drive, running smoothly without shaking, suitable for ultra-thin and fragile wafers
Cleanroom ISO1 standard body, low release material, to avoid wafer particle contamination
Built in multiple vacuum monitoring, automatic leak alarm to prevent wafer from falling and being damaged
Integrated shielding structure, resistant to cavity RF electromagnetic interference, stable sensing
Modular disassembly and assembly design, quick disassembly of the entire machine, reducing downtime for maintenance
Supports both gap and flat edge wafer benchmark recognition, compatible with multiple process wafers
Supporting machine bus communication, real-time uploading of alignment data to the main control system
Low dust sealed bearings, continuous operation in a clean workshop for 7 × 24 hours for a long time
Equipped with a fault status indicator light, quickly locate vacuum, sensor, and motor abnormalities
Compact and miniaturized body, suitable for installation space in narrow transmission chambers inside devices
Yaskawa 0190-41805 wafer pre aligner is a core calibration unit for 300mm wafer transfer, with high accuracy and excellent cleanliness, ensuring stability in handling and process.
Yaskawa 0190-41805 晶圆预对准器 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
