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Edwards NRY24F000 真空泵 产品英文介绍
#Edwards NRY24F000 Vacuum Pump Product Features
Edwards NRY24F000 semiconductor dry vacuum pump, suitable for harsh process exhaust conditions, features the following:
1. Claw type dry pump body structure, completely oil-free, eliminating oil pollution in the process chamber
2. Special corrosion-resistant pump chamber coating, suitable for extracting exhaust gases containing particles and corrosive processes
3. Graded nitrogen purging circuit to reduce the deposition and scaling of by-products
4. Wide load frequency conversion regulation, automatic switching between peak exhaust and standby modes
5. With high pumping speed output, the vacuum remains stable even in the face of fluctuating process gas volume
6. Air cooling solution, no need for external cooling water, more flexible deployment
7. Built in gas ballast function to process condensable steam and reduce internal condensation
8. Local operation panel, allowing for intuitive viewing of operating parameters and status
9. Support multi protocol communication and connect to factory equipment automation control system
10. Built in complete event log, recording faults and operating history for easy traceability
11. Elastic exhaust interface, suitable for different workshop pipeline layouts
12. Optimize the shock-absorbing base, suppress overall vibration, and reduce workshop interference
13. Equipped with multiple protection interlocks for overload, overheating, and gas anomalies
14. Complies with SEMI-S2 safety standards and meets the admission requirements for semiconductor factories
15. Internal vulnerable parts zoning layout, quick on-site replacement, and reduced downtime
Edwards NRY24F000 vacuum pump, air-cooled without water cooling, resistant to particle corrosion, suitable for semiconductor process mass production exhaust scenarios.
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
