AE 3155999-247能量射频导航仪

AE 3155999-247能量射频导航仪 

1.产 品 资 料 介 绍：

AE 3155999-247能量射频导航仪 产品英文介绍

AE 3155999-247 RF Navigation Matcher, a semiconductor plasma process Navigator II digital impedance matching unit, achieves fast impedance matching between the RF power supply and the process cavity, ensuring efficient feeding of RF power into the cavity.

Product Features:

1. Digital tuning architecture, fast response speed, quickly completes impedance matching when the cavity load fluctuates, and reduces reflected power

2. Integrate arc detection and protection, quickly cut off in case of abnormal standing waves during ignition, and protect the RF power supply and cavity components

3. Built in RF sensor, real-time collection of power and impedance data for easy analysis and troubleshooting of process abnormalities

4. Support pulse RF mode, adapt to pulse plasma technology, compatible with multi frequency working conditions and resistant to intermodulation interference

5. Standard rack mounted structure, rich communication interfaces, compatible with semiconductor equipment platforms such as AMAT integration

Product Parameters:

1. Device type: Navigator II RF impedance matching network

2. Operating frequency: 13.56MHz

3. Maximum RF power adaptation: 6000W

4. Communication: Ethernet, analog IO, supports remote parameter reading and writing

5. Working temperature: 5-50 ℃, cabinet rack installation

Application fields:

1. Impedance tuning of plasma chamber in semiconductor etching equipment

2. RF circuit matching for PVD magnetron sputtering thin film deposition

3.PECVD、 Chamber cleaning plasma process system

4. Impedance adaptation between RF power supply and process chamber

5. RF circuit supporting unit for semiconductor mass production equipment

The fast tuning and stable impedance adaptation capability make AE 3155999-247 a key matching component in semiconductor plasma process systems

AE 3155999-247能量射频导航仪 产品展示

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218