1.产 品 资 料 介 绍：
Edwards A533-55-945干式真空泵 产品英文介绍
Edwards A533-55-945 dry vacuum pump, belonging to the IL70N series oil-free dry pump, is the main pump for semiconductor process front-end pumping.
Product Features:
1. Oil free dry structure, will not introduce oil pollution into the chamber, ensuring clean process
2. Corrosion resistant pump chamber design, capable of handling corrosive process exhaust gases generated by etching and deposition
3. Built in gas sweep protection reduces the deposition of by-products and extends the service life of the pump body
4. Low operating noise and good adaptability to the production line cabinet environment
5. Comes with a built-in status monitoring interface, making it convenient to remotely monitor pump operating parameters
Product Parameters:
6. Model: A533-55-945
7. Pump type: IL70N multi-stage dry vacuum pump
8. Extraction medium: corrosive process gas
9. Drive: Built in motor integrated structure
10. Communication: Supports device signal feedback
Application fields:
11. Pre stage vacuum extraction of semiconductor etching equipment
12. Vacuum matching for CVD thin film deposition process
13. Plasma process exhaust gas extraction
14. Flat panel display panel manufacturing process vacuum system
15. Replacement of old pump spare parts for Edwards IL70N series
Vacuum maintenance for semiconductor corrosion process, Edwards A533-55-945 dry vacuum pump adapted to existing production line conditions
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
