ADTEC Plasma Technology AMV-2000AMT自动阻抗匹配单元
1.产 品 资 料 介 绍：
ADTEC Plasma Technology AMV-2000AMT自动阻抗匹配单元 产品英文介绍
ADTEC AMV-2000AMT Automatic Impedance Matching Unit
Product Features:
1. High speed dynamic impedance adjustment, fast response to changes in plasma chamber load, effectively reducing RF reflection power
2. Built in power monitoring and arc protection, limiting power output in case of abnormal load, protecting the supporting RF power supply
3. Metal shielded chassis, resistant to strong electromagnetic interference, and stable long-term continuous operation of semiconductor production lines
4. Equipped with status feedback communication, it can transmit real-time process data such as matching position and reflected power of traveling waves
5. Standardized RF connectors and installation structures, easy on-site replacement and disassembly, and no need to modify the original RF circuit
Product Parameters:
1. Material model: AMV-2000AMT
2. Operating frequency: 13.56MHz
3. Rated RF power: 2000W
4. Control power supply: DC24V
5. Compatible equipment: ADTEC RF power supply matched with plasma process machine
Application fields:
1. Automatic matching of RF impedance in semiconductor dry etching chamber
2. RF energy transfer control in plasma thin film deposition process
3. RF load matching for wafer plasma surface treatment
4. Impedance closed-loop regulation between RF power supply and process chamber
5. Replacement and maintenance of spare parts for ADTEC RF system matching device
This ADTEC AMV-2000AMT automatic impedance matching unit is a key component of the RF plasma circuit, responsible for real-time matching of RF power supply and cavity impedance to ensure plasma process stability
ADTEC Plasma Technology AMV-2000AMT自动阻抗匹配单元 产品展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
