AMAT Applied Materials 0190-41186联锁模块
1.产 品 资 料 介 绍：
核心规格
功能特点
典型应用
安装与维护建议
AMAT Applied Materials 0190-41186联锁模块 英文资料：
AMAT Applied Materials 0190-41186 is a multi-channel safety interlock module used for semiconductor equipment (such as PVD, CVD, EPI) and 300mm wafer platforms to monitor and control signals such as safety gates, emergency stops, sensors, etc., ensuring immediate shutdown or restricted operation in case of abnormalities, in compliance with SEMI S2 safety standards.
Core specifications
Project specification remarks
Application series: 300 mm wafer platform compatible with PVD/CVD/EPI and other systems
Functional safety interlocking and logic control emergency stop, safety door, sensor signal processing
Channel number 16-24 (configurable), typical 20 channels, including input/output
Input signal dry contact, proximity switch, light curtain signal compatible with multiple safety switches
Output type relay/solid-state relay (SSR) can drive contactor/solenoid valve
Working voltage 24 VDC ± 10% monorail power supply
Isolation method: photoelectric isolation+electrical isolation. Each circuit is independent and anti-interference
Communication interface RS-485/Profibus/Modbus (optional) for remote monitoring and diagnosis
Installation method: Standard rail/panel type 100 × 150 × 50 mm (approximately)
Protection level IP20 dustproof and splash proof
Features
Multiple safety monitoring: supports emergency stop, safety door, light curtain, position sensor, etc.
Configurable logic: Flexible adaptation to different devices through dialing or software settings of AND/OR/NOT logic.
Status visualization: Each channel is equipped with dual color LEDs to display signal status in real-time.
Fault diagnosis: It has self diagnosis and channel testing functions, making it easy to quickly locate faults.
Hot swappable design: ｒｅｐｌａｃｅ modules with power on to reduce downtime.
Low noise design: multi-layer PCB+shielding layer to suppress electromagnetic interference.
Typical Applications
300mm wafer load lock chamber safety control
Semiconductor equipment wafer transfer system safety interlock
Industrial automation security access control and light curtain control
Installation and maintenance recommendations
install
Installed in the control cabinet near the controlled equipment, away from strong electromagnetic interference sources.
Separate the wiring of signal and power lines to avoid coupling interference.
wiring
Distinguish between input/output and positive/negative poles according to pin definitions to prevent reverse connections.
Suggest using shielded wire and single point grounding.
maintenance
Regularly clean the dust and check the tightness of the terminals.
Perform functional testing every 6-12 months to ensure reliable interlocking actions.
AMAT Applied Materials 0190-41186联锁模块 产品展示
产品视频
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
