AMAT Applied Materials 0190-08680扫描仪
1.产 品 资 料 介 绍：
AMAT Applied Materials 0190-08680 扫描仪
核心规格
结构与工作原理
AMAT Applied Materials 0190-08680扫描仪 英文资料：
AMAT Applied Materials 0190-08680 Scanner
AMAT 0190-08680 is a high-precision optical scanner designed specifically for semiconductor wafer inspection and positioning, primarily used in wafer pre alignment systems and defect detection applications.
Core specifications
Project Specification Description
Functional positioning: Wafer edge detection and positioning provide information on the center position and notch/flat edge direction of the wafer
Scanning method laser triangulation high-precision non-contact measurement
Resolution ≤ 1 μ m meets high-precision alignment requirements
The scanning range is applicable to 8 "and 12" wafers, and different sizes of wafers can be configured through software
Scan speed up to 100 mm/s to quickly complete wafer alignment
Adjustable working distance of 20-50 mm to adapt to different mechanical structure designs
Interface type: Digital signal: RS-485/Ethernet provides measurement data and control signals
Power requirement: 24 VDC, power consumption<15W, industrial standard power supply
Working environment temperature 10-40 ℃, humidity 30-60% RH suitable for clean room environment
Protection level IP54 dustproof, waterproof and splash proof
Structure and Working Principle
The scanner mainly consists of the following parts:
Laser emission unit: generates a stable laser beam and projects it onto the edge of the wafer
Optical receiving system: collects reflected light and focuses it onto a photodetector
Signal processing circuit: converts optical signals into digital positional information
Communication interface: transmit measurement data to the main control system
Mechanical adjustment mechanism: allows for precise adjustment of scanner position and angle
The working principle is based on laser triangulation method: when the laser beam is irradiated onto the edge of the wafer, the position of the reflected light changes with the height of the wafer surface, and the edge contour of the wafer is accurately measured by detecting the position change of the reflected light spot.
AMAT Applied Materials 0190-08680扫描仪 产品展示
产品视频
3.其他产品
NI PXIE-8135 嵌入式控制器
SCHNEIDER BMXDD16402K 逻辑控制器模块
SCHNEIDER MX-XF/SHT-SHC 电压线圈
4.其他英文产品
ICS TRIPLEX T9432 Programmable module
ICS TRIPLEX T9451 Channel module
TP852 3BSC950263R1 base module
| 6ES5752-0AA23 | CACR-JUM25D2A | EPC-9-166MHZ |
| 6ES5750-2AB21 | CACR-TS555Z1SR-Y9 | C2SBM-RSYS-PL2 |
| 6ES5736-6CB00 | CACR-UP20AAA | 459826-002 |
| 6ES5736-2CF00 | CACR-UP6AAC | 002-1-23158-10 |
| 6ES5736-2CB60 | CACR-UP50AAB | D486DX266 |
| 6ES5736-2BF00 | CACR-02-TE1K | 31337-002 |
| 6ES5735-8BC50 | CACR-SR-44BB1AM | 67-10804-000 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
