AMAT Applied Materials 0190-02506 控制器模块
1.产 品 资 料 介 绍：
- 多子系统协同控制：搭载高性能多核处理器（四核 ARM Cortex-A9，主频 1.2GHz），具备强大的数据处理与指令调度能力，可同时接入 16 路不同类型子系统接口（包括驱动控制接口、真空监测接口、射频功率接口、传感器信号接口），实现对电机驱动、真空阀门、射频发生器等部件的协同控制，系统响应周期≤1ms，确保各子系统动作时序同步性（偏差≤10μs）。
- 高精度工艺参数管控：内置 24 位高精度 ADC（模数转换器）与 16 位 DAC（数模转换器），支持 0-10V 模拟量信号与数字量信号的双向转换，可实时采集并调控工艺关键参数（如腔体温度、气体流量、射频功率），参数测量精度达 ±0.1% FS，控制精度达 ±0.2% FS。例如在刻蚀工艺中，可将腔体温度稳定控制在 ±0.5℃范围内，气体流量控制误差≤±1sccm，满足先进制程对工艺稳定性的要求。
- 灵活的编程与工艺存储：支持 IEC 61131-3 标准编程语言（包括梯形图、功能块图、结构化文本），工程师可根据不同工艺需求自定义控制逻辑与流程；内置大容量存储单元（8GB NAND Flash + 2GB DDR3），可存储不少于 100 组完整工艺配方（含工艺参数、步骤时序、安全联锁条件），配方调用时间≤500ms，实现多品种芯片制造的快速工艺切换。
- 全方位安全联锁与故障处理：集成 SIL 3 级安全控制单元，预设 20 类以上安全联锁逻辑（如真空失压联锁、射频过功率联锁、门控未关联锁），当检测到异常信号（如腔体压力骤升 10Pa/s）时，可在 200μs 内触发紧急停机指令，同时切断危险子系统电源（如射频电源、高压气体阀门）；具备故障自诊断功能，可通过内置诊断算法定位故障模块（如传感器故障、通信链路中断），诊断准确率≥95%，并生成详细故障报告（含故障代码、发生时间、可能原因），支持远程故障分析与排查。
AMAT Applied Materials 0190-02506 控制器模块英文资料：
1、 Core positioning and system of the product
The 0190-02506 controller module is the core command component in the semiconductor equipment central control system of Applied Materials Corporation (AMAT), and belongs to the "Equipment Global Control and Collaboration" product line. In the entire process of semiconductor manufacturing, from wafer transfer, process execution to quality monitoring, multiple systems need to work together. This controller module serves as the "device brain" and is specifically adapted to the AMAT Centura series etching equipment and Producer series deposition equipment. By integrating signals from various subsystems (such as drive systems, vacuum systems, and RF systems), it achieves centralized control of equipment operating parameters, automated scheduling of process flows, and rapid response to abnormal situations. It is the core control unit that ensures efficient, stable, and accurate operation of semiconductor equipment.
2、 Analysis of core functions and technical characteristics
Based on the strict requirements of semiconductor equipment for control accuracy, response speed, and compatibility (such as process parameter control error of ≤± 0.5%), the core characteristics of this controller module can be accurately disassembled into the following points:
Multi subsystem collaborative control: Equipped with a high-performance multi-core processor (quad core ARM Cortex-A9, main frequency 1.2GHz), it has powerful data processing and instruction scheduling capabilities, and can simultaneously access 16 different types of subsystem interfaces (including drive control interface, vacuum monitoring interface, RF power interface, sensor signal interface) to achieve collaborative control of motor drive, vacuum valve, RF generator and other components. The system response cycle is ≤ 1ms, ensuring the synchronization of subsystem action timing (deviation ≤ 10 μ s).
High precision process parameter control: Built in 24 bit high-precision ADC (analog-to-digital converter) and 16 bit DAC (digital to analog converter), supporting bidirectional conversion of 0-10V analog signals and digital signals, can real-time collect and control key process parameters (such as chamber temperature, gas flow rate, RF power), with parameter measurement accuracy of ± 0.1% FS and control accuracy of ± 0.2% FS. For example, in etching process, the chamber temperature can be stably controlled within the range of ± 0.5 ℃, and the gas flow control error is ≤ ± 1sccm, meeting the requirements of advanced process for process stability.
Flexible programming and process storage: Supports IEC 61131-3 standard programming language (including ladder diagrams, functional block diagrams, structured text), engineers can customize control logic and processes according to different process requirements; Built in large capacity storage unit (8GB NAND Flash+2GB DDR3), capable of storing no less than 100 complete process recipes (including process parameters, step timing, safety interlock conditions), with recipe call time ≤ 500ms, achieving fast process switching for multi variety chip manufacturing.
Comprehensive safety interlocking and fault handling: Integrated SIL 3 safety control unit, pre-set with more than 20 types of safety interlocking logic (such as vacuum pressure loss interlocking, RF over power interlocking, and door control unassociated locking),
AMAT Applied Materials 0190-02506 控制器模块 产品展示
产品视频
3.其他产品
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4.其他英文产品
BENTLY 3500/60 163179-01 Monitor card
5SHY3545L0010 3BHB013088R0001 thyristor card
SAC-RL100-M11T Semiconductor encoder
| 6ES5375-0LA15 | CACR-IR10SFB, | 6ES5318-8MB11 |
| 6ES5374-2KL21 | CACR-SR44BY1SD-Y48 | 6DD2920-0XG02 |
| 6ES5374-2FP22 | CACR-SR20TB5BM | 6ES5314-3UA11 |
| 6ES5374-2AL21 | 6SC9111-2AJ45 | 1BF41-0BC0 |
| 6ES5374-2AH21 | CACR-SR30SZ1SD-Y38 | 6DD2920-0XD01 |
| 6ES5374-1KJ11 | 6SC6100-7VA01 | 6DD2920-0XC03 |
| 6ES5374-0AA11 | 6SC6110-0GB00 | 6ES5312-5AA31 |
| 6ES5373-1AA41 | CACR-SR10BB1AM | 6DD2920-0XC02 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
