AMAT Applied Materials 50412411000控制器模块
1.产 品 资 料 介 绍：
- 工艺全流程控制：接收分析输入板（0100-11000）的工艺数据，下发指令至射频模块调节功率、气缸组件（3020-00121）控制动作，实现晶圆上载 - 工艺执行 - 卸载的全自动流程。
- 多子系统协同：联动射频匹配组件（0041-78374）与模拟输入模块（0100-09063），动态补偿射频反射功率，同步调节反应腔温度、压力，保障等离子体稳定性。
- 安全与故障管理：整合射频互锁模块（0100-35565）、气体泄漏检测器信号，危险场景下 0.03s 内切断关键动力源，同时记录故障数据用于溯源与预防性维护。
AMAT Applied Materials 50412411000控制器模块 英文资料：
1、 Core positioning
AMAT 50412411000 is the "global control center" for semiconductor equipment, integrating multi protocol communication, process logic operations, and safety interlock management functions. It is responsible for integrating signals from RF modules (such as 0010-13143), sensors, and actuators to achieve sequential control of process flow and real-time monitoring of equipment status. It is suitable for Class 100 clean environments and high-frequency electromagnetic interference scenarios, ensuring efficient and stable operation of complex processes such as etching and deposition.
2、 Key parameters
Category
Specifications
Control ability
Supports 16 analog I/O, 32 digital I/O, expandable to 64 digital I/O
Computational performance
64 bit multi-core processor, instruction response time ≤ 0.5ms, supports multitasking parallel processing
Protocol compatibility
Supports Profinet, EtherNet/IP, Modbus TCP/RTU, communication speed ≤ 1Gbps
Environmental adaptation
-10-70 ℃, humidity<85%, no condensation, anti EMI interference (EN 61000-6-2)
Security features
SIL 3 certification, integrated overload, short circuit, and over temperature protection, compliant with SEMI S2/S8 standards
Compatibility
Compatible with AMAT 0010-13143 RF module, 0100-66025 control module, 0100-02839 rack components
3、 Core applications
Process full process control: Receive and analyze process data from the input board (0100-11000), issue instructions to the RF module to adjust power, and control the actions of the cylinder components (3020-00121), achieving a fully automated process of wafer loading, process execution, and unloading.
Multi subsystem collaboration: linking the RF matching component (0041-78374) with the analog input module (0100-09063), dynamically compensating for RF reflection power, synchronously adjusting reaction chamber temperature and pressure, and ensuring plasma stability.
Safety and Fault Management: Integrate RF interlock module (0100-35565) and gas leak detector signals, cut off critical power sources within 0.03 seconds in hazardous scenarios, and record fault data for traceability and preventive maintenance.
AMAT Applied Materials 50412411000控制器模块 产品展示
产品视频
3.其他产品
Elmo G-TUB30/480FEHSNA2 1080-01355运动控制模块
Elmo G-TUB30/480ERSS0 伺服驱动器
GE TB43225AF14 断路器
4.其他英文产品
FOXBORO 0399143 SY-0301060R Industrial control card
SY-1025115C SY-1025120E Industrial control card
FOXBORO 0399144 SY-0301059F module
| 6ES5262-8MA12 | 6SC9811-2BE25 | 6DD2920-0AW6 |
| 6ES5261-4UA11 | 6SC9731-0GL0 | TOSHIBA UTNH23A |
| 6ES5256-3AA11 | CACR-SR20BE12M | TOSHIBA USIO21 |
| 6ES5252-5BB11 | 6SC6110-5DA00 | TRICONEX 3806 |
| 6ES5252-4DA11 | CACR-SR03AB1ER-V | TOSHIBA HFAS11**S |
| 6ES5252-4BA11-2EA1 | 6SC9811-4BC10 | TOSHIBA UTLH21 |
| 6ES5247-5AA31 | CACR-SR44BB1AMY114 | TRICONEX 3806E |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
