1.产 品 资 料 介 绍：
LAM 02-405890-00 数字动态控制器产品特点
- LAM 原厂专用控制单元，适配半导体刻蚀设备腔体动态工艺调控
- 高速数字运算芯片，毫秒级实时响应腔体压力、射频参数变化
- 多路隔离模拟量采集通道，精准读取 MFC、真空计传感信号
- 内置射频屏蔽电路，抵御腔体高频电磁干扰，信号无漂移
- 集成过压、过流、静电、短路四重硬件安全防护
- 多组独立数字 I/O 端口，联动气阀、挡板、终点检测组件
- 支持本地背板总线与以太网双通道，双向传输工艺数据
- 动态闭环调节算法，稳定控制刻蚀速率，晶圆工艺一致性高
- 板载多通道状态指示灯，快速定位采集、通讯、输出故障
- 洁净室专用三防涂层，低释气材质，避免晶圆微粒污染
- 标准插拔式机架结构，无需拆解腔体即可快速更换检修
- 宽温工业元器件，7×24 小时无尘车间连续不间断运行
- 内置故障日志存储，记录异常参数便于产线问题追溯
- 同步时序输出功能，实现多腔体工艺动作协同同步
- 出厂全通道参数校准，同型号替换无需重新调试LAM 02-405890-00 数字动态控制器是刻蚀机核心工艺控制模块，调控精度高、抗干扰强，保障晶圆制程稳定输出。
LAM 02-405890-00 数字动态控制器 产品英文
LAM 02-405890-00 Digital Dynamic Controller Product Features
LAM factory specific control unit, adapted for dynamic process control of semiconductor etching equipment cavity
High speed digital computing chip, millisecond level real-time response to chamber pressure and RF parameter changes
Multi channel isolated analog acquisition channel, accurately reading MFC and vacuum gauge sensing signals
Built in RF shielding circuit to resist high-frequency electromagnetic interference from the cavity, with no signal drift
Integrated hardware safety protection for overvoltage, overcurrent, static electricity, and short circuit
Multiple independent digital I/O ports, linked with air valves, baffles, and endpoint detection components
Support local backplane bus and Ethernet dual channel, bidirectional transmission of process data
Dynamic closed-loop adjustment algorithm, stable control of etching rate, high consistency of wafer process
Onboard multi-channel status indicator light, quickly locate acquisition, communication, and output faults
Cleanroom specific three proof coating, low gas release material, to avoid wafer particle contamination
Standard plug-in rack structure, quick replacement and maintenance without disassembling the cavity
Wide temperature industrial components, 7 × 24-hour continuous operation in dust-free workshop
Built in fault log storage, recording abnormal parameters for easy traceability of production line issues
Synchronous timing output function, realizing collaborative synchronization of multi cavity process actions
Factory calibration of all channel parameters, no need for re debugging when replacing the same model
The LAM 02-405890-00 digital dynamic controller is the core process control module of the etching machine, with high regulation accuracy and strong anti-interference ability, ensuring stable output of the wafer process.
LAM 02-405890-00 数字动态控制器 产品展示
视频展示
中文产品
HIMA FB201控制模块
GE HE700GEN200C控制接口模块
GE HE700GEN100C冗余模块
KOLLMORGEN AKM33E-ANCNR-00 servo driver
AB 2711P-K4M20A touch screen
AB 2711P-K4M20A8 touch screen
| IC3600LIVD1 | 531X158FFDADG1 | IC3600AOAL1D1 |
| IC3600LIVC1 | 531X157APCAMG1 | IC3600AOAL1C |
| IC3600LIVA1 | 531X156TRCABG1 | IC3600AOAL1B |
| IC3600LINB1 | 531X156TECABG1 | IC3600AOAL1 |
| IC3600LINB | 531X155TXMACG1 | IC3600AOAK1 |
| IC3600LINA1D1B | 531X155TXMABG1 | IC3600AOAJ1A |
| IC3600LINA1B | 531X149SNCADG1 | IC3600AOAJ1 |
| IC3600LINA1 | 531X149SNCABG1 | IC3600AOAH1B |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
